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Titanium nitride film on sapphire substrate with low dielectric loss for superconducting qubits

Deng, H., Song, Z., Gao, R., Xia, T., Bao, F., Jiang, X., et al. materials_fabrication
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Materials and Fabrication Techniques

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Titanium nitride film on sapphire substrate with low dielectric loss for superconducting qubits
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